Displacement sensor for nanopositioning tasks
Very small displacements, both static and dynamic, are normally generated by piezo actuators. High precision displacement sensors ensure that these displacements are measured to the required nanometre and sub-nanometre accuracies. Resolution and repeatability of up to 0.04nm are possible. Non-contact, capacitive displacement sensors from Micro-Epsilon provide this sub-nanometre precision. The capaNCDT series combines high precision and the required stability.