Positioning of the lens system in lithography machines

Non-contact, inductive displacement sensors (eddy current) measure the position of lens elements in order to achieve the highest possible imaging accuracy. Depending on the lens system, displacement sensors from Micro-Epsilon are used to detect movement and position in up to 6 degrees of freedom. Providing a high frequency response, eddyNCDT sensors also monitor highly dynamic movements of the lens system.

Sensorica-M, Ltd.
443030 Samara
ul. Mechnikova 1, of.203
+7 / 846 / 24 65 213
+7 / 846 / 33 45 517